Request Details. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. The Rainbow® 4520XL offers improved RIE lag, aspect ratios of 5:1 or greater, selectivity's of ≥ 50:1 for contact and for ≥ 30:1 via etch, and operating pressures in the 30-200 mtorr. The Rainbow 4520 etcher comes with Envision operator interface. Lam Research 853-495477-001 Rev B Cable. Tool is set up for 150mm. 1,000s of verified listings, new tools added daily. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. Call your contacts and accept calls from the Zendesk interface using the Rainbow connector. Read more. The problems with the current 4520 35MIL and 50MIL dome bottom electrode are also discussed. Item id:30295, model RAINBOW 4520XL manufactured by LAM RESEARCH Lam Rainbow 4420 E ver1. The organization is led by. 1,000s of verified listings, new tools added daily. Verified. 5. "There's always been a rainbow hanging over your. The Lam Research Rainbow 4520 Standalone System is a single wafer, vacuum load-locked low pressure oxide etch system for etching 0. com. Last Verified: Over 60 days ago. -Condition: installed -8 inch, -no missing parts -envision software -Electrostatic chucks -have end points -4520 is oxide. Veľmi pohodlné nosenie. used. * Bulkhead system mount. 4520, 4520XL, Excelan. Checking availability. * Configured for 6" wafers. used. Mfr. This method is performed in a plasma processing chamber, and a photoresist layer is coded over the dielectric layer. 1,000s of verified listings, new tools added daily. 2. SSSco delivers high quality upgrades and repairs for users of Lam Etch systems, including; Rainbow, Alliance, 2300, 4420, 4520, 9400, 9600, Exelan, Kiyo - mainframe and chambersDisclosed is a system for processing a semiconductor wafer through plasma etching operations. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. P. Includes the fiber optic sensor. An apparatus and a method for lifting a wafer off of an electrostatic chuck after wafer processing operations are provided. Robust and Re-usable Coulombic ESC, made from Al2O3 replaces the OEM Johnson Rahbeck ESC which uses a TiO2 glued plate. 25 microns and. Configuration. This series addresses processes for wafers up to 200mm and feature sizes as small as 0. ASSY CA PMP CART EMO 4520XL – NEW: 1751: Lam Research OnTrak 853-370499-002 – ASSY CA RF GEN #3 INTFC – NEW: 1752: Lam Research OnTrak 853-370499-002 – ASSY. 1,000s of verified listings, new tools added daily. Livingston, United Kingdom. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4720 on Moov's marketplace. LAM RESEARCH RAINBOW 4420 Etcher System. Lam AutoEtch 490/590 6 inch. LAM Rainbow 4520XL LAM Rainbow 4520i LAM Rainbow 4620 LAM Rainbow 4720 This line is over 40 years old, and it is difficult to find companies to support it, but we do! LAM. The Rainbow 4520 is a fully automated, single-wafer plasma Silicon Dioxide Etching system that processes 4-, 5-, 6-, or 8-inch wafers and features top powered electrode plate, programmable electrode spacing, and automatic wafer alignment and placement. 3. The electrode is disposed within a process chamber that includes a support chuck for holding the semiconductor wafer and a pair of RF power sources. Qualify LRS Ceramics and you will never look back at the OEM! Rainbow ® and Alliance ® Systems. If no result is shown, please try to. 4400 series for. Vintage: Feb 26, 1996. Ceramic ESC Lam 4520, 4520XL, EXCELAN. Co9mplete with Envision Software Package . 1,000s of verified listings, new tools added daily. Your processor should be Intel Core i3 560 @ 3. Buy or sell used LAM RESEARCH CORPORATION equipment on Moov's marketplace. Cluster platform Wafer sizes up to 200mm Feature sizes from 0. TCU Model 2080 Operation and Maintenance BOM Version 851-110195-120 Revision B August 2001 Equipment Model: Rainbow 4520 XL. 35 micron. Light enters a water droplet, slowing down and bending as it goes from air to denser water. 000 title claims abstract description 53; 238000005530 etching Methods 0. Pay Your Invoice. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. This paper discusses the specific differences between the 4520XL and the 4520 as pertaining to CD control, uniformity, RIE lag and selectivity. Related products. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. Palette. The Rainbow 4520XL etcher includes the above listed features, plus, a high efficiency. 4420XL, 4520XL and 4720XL series Exelan, ExelanHPT 9400 and 9600 Microwave Strip. Connect Zoho and Rainbow to get in-app access to PBX-powered calls and your call log. Model: Alliance 4. Lam Rainbow 4420 Plasma Etcher. In one embodiment, the process chamber 101 may be a Lam Research Rainbow 4520XL processing chamber, which is available from Lam Research Corporation of Fremont, Calif. 1,000s of verified listings, new tools added daily. Discuss; 210000002381 Plasma Anatomy 0. Included: Unit UFC-1200A Range 200 SCCM Gas: CF Unit UFC-1200 Range: 100 SCCM Gas: CHF3 Unit UFC-1200A Range: 50 SCCM Gas: O2 Unit UF. Description of Lam Research 4520XL. 1,000s of verified listings, new tools added daily. PCB, KIT, GAP BRKOUT 4520XL, GF. 1,000s of verified listings, new tools added daily. 1-A1-004. The wafer lifting mechanism includes a pin lifter yoke that is oriented below an. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4400 on Moov's marketplace. In another case, the system can be configured such that the electrode is grounded and the pair of RF frequencies are fed to. 1,000s of verified listings, new tools added daily. An apparatus and a method for lifting a wafer off of an electrostatic chuck after wafer processing operations are provided. Welcome to J316Gallery. Green. Since 1997 Vacuum Outlet has offered another alternative, allowing you to save a tremendous amount of money on a quality refurbished machine, backed by an outstanding warranty, from a company you know will be around to take care of your future needs. 1,000s of verified listings, new tools added daily. 4520. Login. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520i on Moov's marketplace. Lam Research 853-140218-003 4520XL Match Assy, 853-140389-001-A: 98: Leybold MAG 400 Turbo Pump: 99: LEYBOLD NT 340 M TURBOTRONIK, Magnetic Bearing PCB 2. The DS4520 is a 9-bit nonvolatile (NV) I/O expander with 64 bytes of NV user memory controlled by an I. Lam Refurb Specialists LLC. No Configuration. We will be exhibiting at booth B1-430. Ichor Systems Ltd is set to attend Semicon Europa, November 12th – 15th in Munich, Germany. 1,000s of verified listings, new tools added daily. Browse. Wafer Size: 8 inch. This series addresses processes for wafers up to 200mm and feature sizes as small as 0. Find the best deals on used LAM RESEARCH Rainbow 4520, or send us a request for an item and we will contact you with matches available for sale. Tool was Fully operational until June 29th 2018. 1,000s of verified listings, new tools added daily. 1,000s of verified listings, new tools added daily. Lam- CAL9900 X 3 – Lam Research 853-034160-001 Controller. The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. 00. Details: Low thermal load; Very comfortable to wear; Excellent protection against dangerous particles and liquid chemical splashes; Application range: Construction work; Light maintenance work; Slaughterhouses/livestock holdings; Wood and metal processing; Properties:Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. 4520XXL € 48,77. 1,000s of verified listings, new tools added daily. Details: Low thermal load; Very comfortable to wear; Excellent protection against dangerous particles and liquid chemical splashes; Application range: Construction work; Light maintenance work; Slaughterhouses/livestock holdings; Wood and metal processing; Properties:rainbow, series of concentric coloured arcs that may be seen when light from a distant source—most commonly the Sun—falls upon a collection of water drops—as in rain, spray, or fog. 1,000s of verified listings, new tools added daily. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. Vintage: Condition: Used. Valid Time: Subject to prior sale without notice 4420XL, 4520XL and 4720XL series Exelan, ExelanHPT 9400 and 9600 Microwave Strip. 715-018872-001 LAM Research Rainbow Lower End Hex Plate: 16: 715-031752-208 Lower Electrode Cap, 8 inch with Groove: 17: 715-032012-003 Lam Research A6 Chamb Window Plate: 18:. In a specific example, a wafer lifting mechanism for controlling the lifting of the wafer off of an electrostatic chuck at a completion of processing is defined. Marketplace > Etchers & Ashers > LAM RESEARCH CORPORATION > RAINBOW 4600. 4420 Etch 4520 Etch 4520i Etch 4520 XL Etch 4600 Etch 4700 Etch. Referenzen. Tweet. Please check here to see which original OEM part numbers have been replaced. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. . The problems with the current 4520 35MIL and 50MIL dome bottom electrode are also discussed. The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. AC Rmt EMO Length: N/A. Systems & Spare Parts. Solder ball attache line. The method is performed in a plasma processing chamber, and the photoresist layer is coated over the dielectric layer. Make Offer. In addition, the basic trends that have been seen when transferring processes. The method is performed in a. com. 1,000s of verified listings, new tools added daily. View Details. The Rainbow 4520XL etcher includes the above listed features, plus, a high efficiency. 5. Unique RF match networks are located at the upper and lower. In a specific example, a wafer lifting mechanism for controlling the lifting of the wafer off of an electrostatic chuck at a completion of processing is defined. The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. 1,000s of verified listings, new tools added daily. The information contained in this document is proprietary to OEM GrOup Inc. OLD. csisemi@gmail. Lam Research 810-17059-1 PCB Card 4428b Rainbow Plasma Etcher Used Working: 1602: Lam Research 810-17061-1 Connection PCB Card: 1603: Lam Research 810-17061-1 Connection PCB. List of RAINBOW 4520XL equipment available for sale at fabsurplus. LAM RESEARCH CORPORATION RAINBOW 4520XL. 1: Lam Rainbow 4728: March PX-250 Plasma Asher Etcher: Matrix 302: Matrix 303 Oxford Plasmalab System 133-SN-417718: Oxford Plasmalab System 133 SN-417728: Oxford Plasmalab System 100-SN417795: Plasma Etch BT1: Plasma Etch PE-100 Series: Plasma Therm 700: Plasma Therm 790 RIE. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. The etcher/asher is equipped with a hydrogen-based plasma generator and is capable of performing oxygen-based etching or ash operations. Disclosed is a system for processing a semiconductor wafer through plasma etching operations. LAM RESEARCH CORPORATION RAINBOW 4520XL. Last Verified Over 30 days ago. LAM equipment refurbishment, parts / part refurbishment, service, support. Systems & Spare Parts. The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems, introduced in 1987. 1: Lam Rainbow 4728: March PX-250 Plasma Asher Etcher: Matrix 302: Matrix 303 Oxford Plasmalab System 133-SN-417718: Oxford Plasmalab System 133 SN-417728: Oxford Plasmalab System 100-SN417795: Plasma Etch BT1: Plasma Etch PE-100 Series: Plasma Therm 700: Plasma Therm 790 RIE. Plasmatherm 790:. Lam- 849-020338-001 Lam Research Load Station Annual PM Kit. . The method is performed in a plasma processing chamber, and the photoresist layer is coated over the dielectric layer. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. About MyRicoh. Price: $1005. Disclosed is a system for processing a semiconductor wafer through plasma etching operations. Mfr. The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. Condition: It was Complete, working. Yellow. Memsstar Specializes in Lam Research Alliance and Rainbow Etch Platforms. Lam Rainbow 4420 E ver1. 35 micron. 1,000s of verified listings, new tools added daily. Qualify LRS Ceramics and you will never look back at the OEM! Rainbow ® and Alliance ® Systems. 5″ Diameter Condenser Optic for Wafer Manufacturing Possibly Lam Research. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. 1,000s of verified listings, new tools added daily. Finally, all the etches must be cost effective as measured with the standard metrics of cost of ownership (COO), and overall equipment effectiveness (OEE). 25 to 0. Configuration. Along with its experience serving semiconductor. The 4520 protective coverall from 3M is disposable safety work wear made of lightweight, breathable polypropylene. Wafer Size: 6" Equipment Configuration: - 2MHz/27MHz - Orbital Gas Box - Osaka HGP TS443 - ESC, MFCs, manometers. Size Build Code Module Manufacturer Model (mm) Serial No. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. OEM: Lam Research. That is the task. The easiest way to remember the rainbow color order is to use the mnemonic device ROYGBIV, in which each letter stands for the first letter of the color names. The first surface is configured to receive processing gases from a source that is external to the system and flow the. 35 lbs; Product Details 3M(TM) 4520 protective coveralls. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. 7. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4470 on Moov's marketplace. Description. The following are the items available for sale related to RAINBOW 4520XL at SDI fabsurplus. Disclosed is a system for processing a semiconductor wafer through plasma etching operations. Buy or sell used LAM RESEARCH CORPORATION equipment on Moov's marketplace. Systems & Spare Parts. LAM RESEARCH. 1,000s of verified listings, new tools added daily. 1,000s of verified listings, new tools added daily. com. 6. comBuy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. OEM Model Description. 0 GHz or a more powerful one. See specs for product details. 1,000s of verified listings, new tools added daily. OEM Part Number 685-096202-002. Response surface methodology was employed to correlate input parameters with etching results. Since 1997 Vacuum Outlet has offered another alternative, allowing you to save a tremendous amount of money on a quality refurbished machine, backed by an outstanding warranty, from a company you know will be around to take care of your future needs. Only part missing are the two hine indexers which I can provide or i can reduce price to 75,000. Kapkan is a good starter op for beginners. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520i on Moov's marketplace. Water droplets are floating in the air (this is why we see rainbows right after it rains) The sky is clear enough of clouds for the rainbow to be seen. The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. Rectangle. NFTs See NFT details and trade from your wallet. Add to cart Description; Use 3M™ Protective Coverall 4520 for protection against dirt, splashes and toxic dusts, including nuclear particles. 1,000s of verified listings, new tools added daily. To precisely create these challenging structures, Lam’s Flex ® product family offers differentiated technologies and application-focused capabilities for critical dielectric etch applications. Use 3M™ Protective Coverall 4520 for protection against dirt, splashes and toxic dusts, including nuclear particles. This system features a low pressure main chamber for anisotropic etching of dielectric films with low conductance manifold, pick and place wafer Summary for ony given, as follows. Payment & Billing Questions. How Rainbows Are Made. Fine particle concentrations in the southern half of the state are expected to be moderate throughout the day. In one embodiment, the process chamber 101 may be a Lam Research Rainbow 4520XL processing chamber, which is available from Lam Research Corporation of Fremont, Calif. In another case, the system may be configured such that the electrode body is grounded and a pair. Vintage: 1998. The Rainbow 4520XL etcher includes the above listed features, plus, a high efficiency. 1,000s of verified listings, new tools added daily. In a specific example, a wafer lifting mechanism for controlling the lifting of the wafer off of an electrostatic chuck at a completion of processing is defined. The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems, introduced in 1987. The 4520XL is the first product in Lam's new XL series of etch tools developed on the Rainbow platform and will be available as both standalone systems or as retrofit upgrades to the company's installed base of Rainbow systems. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520i on Moov's marketplace. The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. The Rainbow 4600 is specifically designed for etching tungsten films. LAM 4520XL Upper RF Match Assembly. 1,000s of verified listings, new tools added daily. 4012 Rainbow Hill Ln , Victoria, BC V8X0A is currently not for sale. 1 4520XL/9400/XL. Applied Materials Centura I phase II DPS + POLY 200mm system AMATBuy or sell a used LAM RESEARCH CORPORATION RAINBOW 4450 on Moov's marketplace. 1,000s of verified listings, new tools added daily. Abstract Beautiful Rainbow Color Gradient Background Texture. The Rainbow 4520 is a fully automated, single-wafer plasma. 26421 LAM RESEARCH PCB, 4520XL PH2, I/O MB, POS, LOGIC 810-495585-001 quantity. New Lam Research Four Pin Lifter Assembly. 18 micron Acc. 1,000s of verified listings, new tools added daily. Rainbow 4520. Disclosed is a system for processing a semiconductor wafer through plasma etching operations. The wafer lifting mechanism includes a pin lifter yoke that is oriented below an. OEM Group, Inc. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. Location: Asia. 853-015130-204 | LAM Research RF Mini-Match. Pre-owned. 4520XL. Built for protection and designed for comfort, this protective gear features breathable back panels and an anatomical fit for enhanced wear, coverage, and comfort while working. Tool is set up for 150mm. LAM Rainbow 4520XL LAM Rainbow 4520i LAM Rainbow 4620 LAM Rainbow 4720 This line is over 40 years old, and it is difficult to find companies to support it, but we do! LAM AutoEtch 490 LAM AutoEtch 590 LAM AutoEtch 690 LAM AutoEtch 790 Bay Area / San Jose, California The following are the items available for sale related to RAINBOW 4520XL at SDI fabsurplus. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. EAN: 04046719401123: Jednotka: Kus. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. Your problems are now my problems and I will get to the root cause of the. Search For Datasheets. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. 4520XL. Alliance and Rainbow Alliance 4420XL, 4520XL and 4720XL series Exelan, ExelanHPT 9400 and 9600 Microwave Strip Key Features Cluster platform Wafer sizes up to 200mm Feature sizes from 0. This paper discusses the specific differences between the 4520XL and the 4520 as pertaining to CD control, uniformity, RIE lag and selectivity. 4520 is called 4520xl with larger chamber. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. 1,000s of verified listings, new tools added daily. Superbly breathable and soft with a cloth like feel it can be worn for extended periods comfortably and protects against static discharge, hazardous particulates and liquid splash Type 5/6. CN1323444A CN99807590A CN99807590A CN1323444A CN 1323444 A CN1323444 A CN 1323444A CN 99807590 A CN99807590 A CN 99807590A CN 99807590 A CN99807590 A CN 99807590A CN 1323444 A CN1323444 A CN 1323444A Authority CN China Prior art keywords electrode plasma semiconductor wafer area plasma sheath Prior art date 1998. Add to Cart Buy Now. Tran-Quinn, T. Download PDF Info Publication number CN1513200A. Frézování. 1,000s of verified listings, new tools added daily. Etch Alliance and Rainbow Alliance 4420XL, 4520XL and 4720XL series Exelan, ExelanHPT 9400 and 9600 Microwave Strip Key Features Cluster platform Wafer sizes up to 200mm Feature sizes from 0. 5 μm contact holes and above at aspect ratios of <4:1. LAM RESEARCH CORPORATION RAINBOW 4520XL Etchers & Ashers. with IPX BOC pumps and chiller. Office: (972) 635-6900 Email: sales@jtmtechnologies. 0: 100: Novellus 27-10157-00 IOC Module controller I/O Digital Dynamics, C2, Sequel: 101: RORZE RE201-822-016 Wafer cassette sorter elevator, SANYO DENKI RM26A3S: 102:. Lam Research 4520XL back on market. The rainbow is observed in the direction opposite to the Sun. The system has a process chamber that includes a support chuck for holding the semiconductor wafer and a pair of RF power sources. Documents No documents OEM Model Description. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520XL on Moov's marketplace. 25 to 0. 1,000s of verified listings, new tools added daily. Click here to search for more FAB Dry Etch items; Similar items that may be of interest: Lam Research 853-011168-002 Rev C Surge Protector, Gap Drive Motor Assy Lam Research 853-011168-002 Rev C . Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. Lam Rainbow 4520 Plasma Etcher. Location: Asia. In a particular example, a wafer lift mechanism for controlling the lift of the wafer separation relative to the electrostatic chuck at the end of the process is defined. This series of products addresses processes that utilize wafer sizes up to 200mm and feature sizes as small as 0. 1,000s of verified listings, new tools added daily. Lam Research 853-495477-001 Rev B Cable. No description available. 1,000s of verified listings, new tools added daily. LAM RESEARCH RAINBOW 4520XL ETCHER - OXIDE available for Sale by SDI Group. The coloured rays of the rainbow are caused by the refraction and internal reflection of light. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. 1,000s of verified listings, new tools added daily. A method is disclosed for improving selectivity of dielectric layer to photoresist layer and base layer. +358 9 342 4300Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. Familiarity with: LAM TCP (9600) Etchers, LAM Rainbow (4420, 4520, 4520XL) Etchers, Alliance Platform, AMAT Poly (MxP+, DPS) Etchers, TEL DRM Etchers, Hitachi CD SEM, Tencor Profilometer. Vintage: Condition: Used. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4400 on Moov's marketplace. 00 ea. Co9mplete with Envision Software Package. LAM RESEARCH CORPORATION RAINBOW 4520XL. The Rainbow® 4520 Standalone system is a single wafer, vacuum load-locked low pressure oxide system for etching 0. Blue. Lam Refurb Specialists LLC. Contact Etch in the LAM 4520XL Using Standard CF4/CHF3 Chemistry. The system has a processing chamber including a support chuck for holding a semiconductor wafer and a pair of RF power supplies. OEM: Lam Research. Summary for ony given, as follows. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520I on Moov's marketplace. Tool is set up for 150mm. 4046719401154. The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems, introduced in 1987. com, a global distributor of electronics components. The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems, introduced in 1987. Turbo Pump: Yes. The present invention provides a system for processing a semiconductor wafer through a plasma etching operation. 1,000s of verified listings, new tools added daily. Any unauthorized use is prohibited. TCU Supply: N/A: Remote User Cable Length: Software: Author: les. Checking availability. Categories: Semi & SMT/PCB, Etchers. Of course, other suitably arranged processing chambers may be used to achieve the highly selective etching operations of the present invention. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4520 on Moov's marketplace. Make Offer. 1,000s of verified listings, new tools added daily. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4420 on Moov's marketplace. 4520I, 4520XL, 4520XLe, 9600, 9400, 9400PTX. 1,000s of verified listings, new tools added daily. 1,000s of verified listings, new tools added daily. XL. Buy or sell a used LAM RESEARCH CORPORATION RAINBOW 4728B on Moov's marketplace. print version 186 Cycle Time Improvement in Manufacturing Nitrided Gate Oxides for ULSI CMOS Applications. The Rainbow 4520XL etcher includes. Superbly breathable and soft with a cloth like feel it can be worn for extended periods comfortably and protects against static discharge, hazardous particulates and liquid splash Type 5/6. 1,000s of verified listings, new tools added daily. An apparatus and a method for lifting a wafer off of an electrostatic chuck after wafer processing operations are provided. star,Lam 4240,Lam 4400,Lam 4420,Lam 4520,Lam 4620,Lam 4720,Lam 4420XL,Lam 4428,LAM 4500,Lam 4520 Alliance,Lam 4520 Rainbow,Lam. 5um Contact holes at aspect ratios. 1,000s of verified listings, new tools added daily. 25 to 0. 1,000s of verified listings, new tools added daily. Categories: Semi & SMT/PCB, Etchers.